- Title: Subtitle
- Spectroscopic characterization of acid mobility in 248-nm chemically amplified resists.
- Creators
- G. J. BlanchardJ. L. JessopS. N. GoldieAlec B. Scranton
- Resource Type
- Abstract
- Publication Details
- Abstracts of Papers of the American Chemical Society, Vol.219, p.57-PMSE
- ISSN
- 0065-7727
- Language
- English
- Date published
- 03/01/2000
- Academic Unit
- Chemical and Biochemical Engineering
- Record Identifier
- 9983557249302771
Abstract
Spectroscopic characterization of acid mobility in 248-nm chemically amplified resists.
Abstracts of Papers of the American Chemical Society, Vol.219, p.57-PMSE
03/01/2000
Abstract
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