Assessing the spectral resolution of high energy diffraction gratings made with electron-beam lithography

$Assessing the spectral resolution of high energy diffraction gratings made with electron-beam lithography$

Conference proceeding

Casey T. DeRoo, Randall L. McEntaffer, Fabien Grisé and Benjamin D. Donovan

Optics for EUV, X-Ray, and Gamma-Ray Astronomy X

08/10/2021

DOI: 10.1117/12.2594708

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Materials Science

Optics

Diffraction grating

Electron-beam lithography

High energy

Optical metrology

Spectral resolution

X-ray spectroscopy

Title: Subtitle: Assessing the spectral resolution of high energy diffraction gratings made with electron-beam lithography
Creators: Casey T. DeRoo - University of Iowa
Randall L. McEntaffer - Pennsylvania State University
Fabien Grisé - Pennsylvania State University
Benjamin D. Donovan - Pennsylvania State University
Resource Type: Conference proceeding
Publication Details: Optics for EUV, X-Ray, and Gamma-Ray Astronomy X
Publisher: SPIE
DOI: 10.1117/12.2594708
Language: English
Date published: 08/10/2021
Academic Unit: Physics and Astronomy; University College Courses
Record Identifier: 9984530383902771

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