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Characterizing fabrication quality and UV performance of UV gratings
Conference proceeding

Characterizing fabrication quality and UV performance of UV gratings

Jared A. B. Termini, Keri Hoadley, Casey DeRoo, Cecilia Fasano, Paul Scowen, Jacob Ward, Manuel Quijada, Javier Del Hoyo, Luis Rodriguez de Marcos and Mateo Batkis
Proceedings of SPIE, the international society for optical engineering, Vol.14154, pp.141548Q-141548Q-9
08/21/2026
DOI: 10.1117/12.3104978

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Abstract

Ultraviolet (UV, 90−200 nm) spectroscopy is a powerful tool for probing astrophysical systems, as it traces baryonic matter across many phases and temperatures. Achieving our future science goals will require high-performance, large-format gratings, but directly measuring their UV efficiency is costly and time-consuming. If trends between the UV performance and fabrication quality of small gratings can predict the performance of larger gratings, we can streamline the UV grating characterization process. We present results from a multiyear study assessing fabrication quality and UV performance of small gratings. We use optical interferometry to determine the gratings’ period error and limiting resolution. We use single-point metrology to measure the surface roughness. We characterize the gratings’ UV performance via efficiency measurements from 90−200 nm. We investigate correlations between fabrication metrics and UV performance, enabling metrology-based prediction of large-format grating performance.

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