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Extremely low reflectivity nanoporous black silicon surface by copper catalyzed etching for efficient solar cells
Conference proceeding

Extremely low reflectivity nanoporous black silicon surface by copper catalyzed etching for efficient solar cells

K. A. S. M. Ehteshamul Haque, Wenqi Duan and Fatima Toor
2017 IEEE 44th Photovoltaic Specialist Conference (PVSC), pp.346-351
Photovoltaic Specialist Conference (PVSC), 44 (Washington, DC, USA, 06/25/2017–06/30/2017)
06/2017
DOI: 10.1109/PVSC.2017.8366117

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Abstract

In this work, we report on a process based on copper (Cu) catalyzed etching of silicon (Si) to obtain extremely low reflectivity nanoporous `black silicon' (bSi) surface. We explore both one-step and two-step etching process, and find that one-step etching results in a uniformly etched surface reproducibly, compared with the two-step process. Adding ascorbic acid (C 6 H 8 O 6 ) in the one-step process recipe results in inverted pyramid shaped pores that enhance light trapping and lowers the bSi surface reflectivity. We observe that the optimum concentration of hydrogen peroxide (H 2 O 2 ) in the etching solution depends on the sample size. The lowest spectrum-weighted-average reflectivity (R avg ) obtained from the optimized one-step etching process is 3.36%.
antireflective porous siliconsurface black silicon Etching Hafnium light trapping metal assisted catalyzed etching Nanoparticles Plating Silicon Surface morphology

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