Conference proceeding
Mechanical Ruling of Diffraction Grating: Part I — Aluminum Film Preparation and Characterization
Volume 2: Materials; Biomanufacturing; Properties, Applications and Systems; Sustainable Manufacturing, Vol.2
ASME 2016 11th International Manufacturing Science and Engineering Conference, Blacksburg, Virginia, USA, Jun. 27 - Jul. 01, 2016
06/27/2016
DOI: 10.1115/MSEC2016-8713
Abstract
This is Part I of a two part series study on mechanical ruling of diffraction grating. Mechanical ruling is a major method for fabricating diffraction grating. In mechanical ruling, the first step is to prepare the Al film. High quality preparation technique is needed to satisfy the requirements of the thickness and the mechanical properties of the film. The purpose of this paper is to present a complete study on the preparation technique and mechanical properties of the Al film used for mechanical ruling of diffraction grating. XRD and SEM experiments and analysis were conducted to investigate the microstructure of the Al film and the mechanical properties of the Al film were measured using nanoindentation and scratch tests. The Al film exhibits favorable mechanical properties which will the key for the experimental and numerical simulation studies of mechanical ruling of diffraction grating.
Details
- Title: Subtitle
- Mechanical Ruling of Diffraction Grating: Part I — Aluminum Film Preparation and Characterization
- Creators
- Qinghua Wang - University of IowaBaoqing Zhang - University of IowaNinggang Shen - University of IowaHongtao Ding - University of Iowa
- Resource Type
- Conference proceeding
- Publication Details
- Volume 2: Materials; Biomanufacturing; Properties, Applications and Systems; Sustainable Manufacturing, Vol.2
- Conference
- ASME 2016 11th International Manufacturing Science and Engineering Conference, Blacksburg, Virginia, USA, Jun. 27 - Jul. 01, 2016
- DOI
- 10.1115/MSEC2016-8713
- Publisher
- American Society of Mechanical Engineers
- Language
- English
- Date published
- 06/27/2016
- Academic Unit
- Mechanical Engineering
- Record Identifier
- 9984196498302771
Metrics
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