Optimization of MoO3–Si Substrate Interactions for Precise Kirigami by Focused Ion Beam

Conference proceeding

Peer reviewed

Bhaveshkumar Kamaliya, Rachel Ord, Caleb Whittier, Mehdi Mosayebi, Ramachandra Bangari, Thomas Folland, Ravitej Uppu and Nabil Bassim

Microscopy and microanalysis, Vol.32(Supplement_1)

07/27/2026

DOI: 10.1093/mam/ozag053.129

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Title: Subtitle: Optimization of MoO3–Si Substrate Interactions for Precise Kirigami by Focused Ion Beam
Creators: Bhaveshkumar Kamaliya - McMaster University
Rachel Ord - McMaster University
Caleb Whittier - McMaster University
Mehdi Mosayebi - McMaster University
Ramachandra Bangari - University of Iowa
Thomas Folland - University of Iowa
Ravitej Uppu - University of Iowa, Physics and Astronomy
Nabil Bassim - Austrian Centre for Electron Microscopy and Nanoanalysis
Resource Type: Conference proceeding
Publication Details: Microscopy and microanalysis, Vol.32(Supplement_1)
DOI: 10.1093/mam/ozag053.129
ISSN: 1431-9276
eISSN: 1435-8115
Publisher: Oxford University Press
Language: English
Date published: 07/27/2026
Academic Unit: Physics and Astronomy
Record Identifier: 9985214915702771

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