- Title: Subtitle
- Spectroscopic characterization of acid mobility in chemically amplified resists
- Creators
- Julie L. JessopGary J. BlanchardScott N. GoldieAlec B. Scranton
- Resource Type
- Conference proceeding
- Publication Details
- Advances in Resist Technology and Processing XVII : 28 February - 1 March 2000, Santa Clara, USA (Proceedings of SPIE - The International Society for Optical Engineering, 3999-2), (1), pp.161-170
- Conference
- 3999 (Santa Clara, California, United States)
- DOI
- 10.1117/12.388299
- ISSN
- 0277-786X
- Language
- English
- Date published
- 02/27/2000
- Academic Unit
- Chemical and Biochemical Engineering
- Record Identifier
- 9983557247102771
Conference proceeding
Spectroscopic characterization of acid mobility in chemically amplified resists
Advances in Resist Technology and Processing XVII : 28 February - 1 March 2000, Santa Clara, USA (Proceedings of SPIE - The International Society for Optical Engineering, 3999-2), (1), pp.161-170
3999 (Santa Clara, California, United States)
02/27/2000
DOI: 10.1117/12.388299
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