Towards realizing adjustable x-ray optics for astronomy using TFT-addressed thin-film PZT actuators

Gavin Frueh; Casey DeRoo; J. Goodman; Susan Trolier-McKinstry; Thomas N. Jackson; Hanyuan Liang; Paul Reid

doi:10.1117/12.3105222

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Conference proceeding

Towards realizing adjustable x-ray optics for astronomy using TFT-addressed thin-film PZT actuators

Gavin Frueh, Casey DeRoo, J. Goodman, Susan Trolier-McKinstry, Thomas N. Jackson, Hanyuan Liang and Paul Reid

Proceedings of SPIE, the international society for optical engineering, Vol.14146, pp.1414647-1414647-13

08/17/2026

DOI: 10.1117/12.3105222

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Abstract

We report on progress towards realizing adjustable X-ray optics with thin-film actuators. These mirror devices utilize thin-film lead zirconate titanate (PZT) as a piezoelectric actuator, with ZnO thin-film transistors (TFTs) to allow simple array addressing. By dividing this film into discrete cells and applying a low voltage, the actuators produce a localized, biaxial strain. Manufacturing thin-film actuator stacks and TFTs on the non-reflective sides of thin segments is hence a viable technology pathway for realizing high performance X-ray optics. In this presentation, we discuss the requirements for and benefits of adapting from glass to silicon mirror substrates. Furthermore, we report on measurements of the thin-film stresses associated with stages of device fabrication process as measured via interferometry, and discuss the progress towards compensating for the net integrated stress with controlled growth of a silicon dioxide layer.

Details

Title: Subtitle: Towards realizing adjustable x-ray optics for astronomy using TFT-addressed thin-film PZT actuators
Creators: Gavin Frueh - University of Iowa
Casey DeRoo - University of Iowa
J. Goodman - Pennsylvania State University
Susan Trolier-McKinstry - Pennsylvania State University
Thomas N. Jackson - Pennsylvania State University
Hanyuan Liang - Pennsylvania State University
Paul Reid - Paul Reid Optics (United States)
Contributors: Shouleh Nikzad (Editor) - Jet Propulsion Laboratory
Kazuhiro Nakazawa (Editor) - Nagoya University
Marco Feroci (Editor) - INAF - Istituto di Astrofisica e Planetologia Spaziali (Italy)
Resource Type: Conference proceeding
Publication Details: Proceedings of SPIE, the international society for optical engineering, Vol.14146, pp.1414647-1414647-13
DOI: 10.1117/12.3105222
ISSN: 0277-786X
Publisher: SPIE
Language: English
Date published: 08/17/2026
Academic Unit: Physics and Astronomy; University College Courses
Record Identifier: 9985241011002771

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