Conference proceeding
Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms
Vol.8979, pp.897907-897907-11
03/07/2014
DOI: 10.1117/12.2035270
Abstract
This paper summarizes our decade-long research efforts towards superfast 3D shape measurement leveraging the digital
micromirror device (DMD) platforms. Specifically, we will present the following technologies: (1) high-resolution real-time
3D shape measurement technology that achieves 30 Hz simultaneous 3D shape acquisition, reconstruction and display
with more than 300,000 points per frame; (2) Superfast 3D optical metrology technology that achieves 3D measurement at
a rate of tens of kHz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing
technology for superfast and high-accuracy 3D optical metrology using the DMD platforms. This paper will present both
principles and experimental results.
Details
- Title: Subtitle
- Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms
- Creators
- Tyler Bell - Iowa State Univ. (United States)Song Zhang - Iowa State Univ. (United States)
- Contributors
- Michael R Douglass (Editor) - Texas Instruments Inc. (United States)Philip S King (Editor) - Texas Instruments Inc. (United States)Benjamin L Lee (Editor) - Texas Instruments Inc. (United States)
- Resource Type
- Conference proceeding
- Publication Details
- Vol.8979, pp.897907-897907-11
- Publisher
- SPIE
- DOI
- 10.1117/12.2035270
- ISSN
- 0277-786X
- Language
- English
- Date published
- 03/07/2014
- Academic Unit
- Electrical and Computer Engineering
- Record Identifier
- 9984083212602771
Metrics
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