Dataset
Dataset for: Non-destructive characterization of silicon nanowires and nanowire coatings using mid-infrared spectroscopy
University of Iowa
08/11/2025
DOI: 10.25820/data.007060
Abstract
Silicon nanowires (SiNWs) have attracted much attention and are highly promising for electronics and photonics applications, offering a cost-effective material platform. Monitoring material properties such as their length, density, and presence of oxides or other chemicals on the surface using imaging techniques is not ideal as they require destructive cleaving of the sample. This work aims to predict the density of SiNWs, a crucial factor influencing their performance, by employing variable angle Fourier Transform IR (FTIR) reflectance spectroscopy as a non-destructive technique. By knowing the length of the nanowire and the space between fringes, we can predict the density of metal-assisted chemically etched (MACE) SiNW arrays using Effective Medium Theory(EMT). This technique is also able to measure few-nanometer-thick layers of aluminum oxide (AlOx) grown radially around the SiNWs’ length using atomic layer deposition (ALD). We determine both length and density of the NWs for a range of NW lengths between 3 μm and 14 μm and we find that the best fit for SiNWs' areal fill fraction is 0.3 for our samples and processes.
In this work, we develop a MATLAB script to predict the optical properties of nanowires (NWs) based on Effective Medium Theory (EMT) and 4×4 transferred matrices written by Nikolai Christian Passler and etl1. The code calculates optical characteristics, including reflection, density and the thickness of coated layers using the permittivity of the surrounding media. To perform these calculations, the user must input the shell and core diameter, incident angle of light and optical properties of media. The code calculates both parallel and perpendicular permittivity using the effective medium approach and determines the reflection coefficient, density and length of NWs using a 4×4 transferred matrix formalism.
Details
- Title: Subtitle
- Dataset for: Non-destructive characterization of silicon nanowires and nanowire coatings using mid-infrared spectroscopy
- Creators
- S. Maryam Vaghefi Esfidani - University of IowaFatima Toor - University of Iowa, Iowa Technology InstituteThomas G Folland - University of Iowa, Physics and Astronomy
- Contributors
- Brian Westra (Data Curator) - University of Iowa, Humanities and Social Sciences/Scholarly Impact
- Resource Type
- Dataset
- DOI
- 10.25820/data.007060
- Publisher
- University of Iowa
- Grants
- N00014-23-1-2567, Office of Naval Research (United States, Arlington) - ONR
- Date published
- 08/11/2025
- Academic Unit
- Electrical and Computer Engineering; Iowa Technology Institute; Physics and Astronomy; Humanities and Social Sciences/Scholarly Impact; Holden Comprehensive Cancer Center
- Record Identifier
- 9984582858802771
Metrics
1 Record Views