Controlling the charge of dust particles in an afterglow by modulating the plasma power

Neeraj Chaubey; John Goree

doi:10.1088/1361-6463/ad291c

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Controlling the charge of dust particles in an afterglow by modulating the plasma power

Journal article

Open access

Peer reviewed

Controlling the charge of dust particles in an afterglow by modulating the plasma power

Neeraj Chaubey and John Goree

Journal of physics. D, Applied physics, Vol.57(20), 205202

02/21/2024

DOI: 10.1088/1361-6463/ad291c

Appears in UI Libraries Support Open Access

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Abstract

A dust particle immersed in a glow-discharge plasma has long been known to have a charge that is negative, while the plasma is powered. However, in the afterglow, following the stopping of the plasma power, a large positive charge can collect on the particle, as was shown recently for particles in a cathodic sheath. While that outcome of positive charging in the afterglow may be common, an experiment reported here reveals that the opposite outcome is also possible: a particle can develop a negative charge in the afterglow, if the plasma had previously been operated with a modulated power. Before stopping the plasma power off altogether, in a run with power modulated at a low duty cycle of 4.5%, the particle’s residual charge was negative, but it was positive in a control run without modulation. This result points to a way of controlling the charge of dust particles in a decaying plasma, which can be useful for mitigating defects in semiconductor manufacturing.

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Details

Title: Subtitle: Controlling the charge of dust particles in an afterglow by modulating the plasma power
Creators: Neeraj Chaubey - University of Iowa
John Goree - University of Iowa
Resource Type: Journal article
Publication Details: Journal of physics. D, Applied physics, Vol.57(20), 205202
DOI: 10.1088/1361-6463/ad291c
ISSN: 0022-3727
eISSN: 1361-6463
Publisher: IOP Publishing
Grant note: DOI: 10.13039/100000001, name: National Science Foundation, award: PHY-1740379; name: Army Research Office under MURI, award: W911NF-18-1-0240; DOI: 10.13039/100000015, name: United States Department of Energy, award: DE-SC0014566; name: NASA/JPL, award: 1672641 and 1689926
Language: English
Date published: 02/21/2024
Academic Unit: Physics and Astronomy; Mechanical Engineering
Record Identifier: 9984560419302771

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