Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

Julian Walker; Tianning Liu; Mohit Tendulkar; David N Burrows; Casey T DeRoo; Ryan Allured; Edward N Hertz; Vincenzo Cotroneo; Paul B Reid; Eric D Schwartz; Thomas N Jackson; Susan Trolier-McKinstry

doi:10.1364/OE.26.027757

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Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

Journal article

Open access

Peer reviewed

Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

Julian Walker, Tianning Liu, Mohit Tendulkar, David N Burrows, Casey T DeRoo, Ryan Allured, Edward N Hertz, Vincenzo Cotroneo, Paul B Reid, Eric D Schwartz, …

Optics express, Vol.26(21), pp.27757-27772

10/15/2018

DOI: 10.1364/OE.26.027757

PMID: 30469836

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Abstract

Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb (Zr Ti ) Nb O ) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.

Details

Title: Subtitle: Design and fabrication of prototype piezoelectric adjustable X-ray mirrors
Creators: Julian Walker - Pennsylvania State University
Tianning Liu - Pennsylvania State University
Mohit Tendulkar - Pennsylvania State University
David N Burrows - Pennsylvania State University
Casey T DeRoo - Harvard University
Ryan Allured - Harvard University
Edward N Hertz - Harvard University
Vincenzo Cotroneo - Harvard University
Paul B Reid - Harvard University
Eric D Schwartz - Harvard University
Thomas N Jackson - Pennsylvania State University
Susan Trolier-McKinstry
Resource Type: Journal article
Publication Details: Optics express, Vol.26(21), pp.27757-27772
DOI: 10.1364/OE.26.027757
PMID: 30469836
ISSN: 1094-4087
eISSN: 1094-4087
Grant note: DOI: 10.13039/100000104, name: National Aeronautics and Space Administration (NASA), award: 15-APRA15-0131, NNX16AG29G, NNX17AF66G
Language: English
Date published: 10/15/2018
Academic Unit: Physics and Astronomy; University College Courses
Record Identifier: 9984200053202771

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