Journal article
Development of Polyimide-based Flexible Tactile Sensing Skin
MRS proceedings, Vol.736, pp.165-170
2002
DOI: 10.1557/PROC-736-D4.5
Abstract
We present a novel microfabrication process for realizing a new type of flexible sensory “smart skin”. In this work, we focus on demonstration of a skin containing a two dimensional array of tactile sensors using polyimide and metal strain gauges. A novel polymer microfabrication approach coupled with surface release methods is demonstrated. The process yields flexible sensory skins in a low cost, efficient manner. Experimental characterization of the devices is also presented. The demonstrated sensors use metal-film strain gauges in a multiplexed two-dimensional array of tactile pixels (taxels) embedded in a polyimide thin film membrane to detect force distribution on the flexible skin. The arrays have been used to image force distributions and could be used with slip-detection friction measurement for robotic gripping application.
Details
- Title: Subtitle
- Development of Polyimide-based Flexible Tactile Sensing Skin
- Creators
- Jonathan Engel - Micro and Nanotechnology LaboratoryJack Chen - Micro and Nanotechnology LaboratoryChang Liu - Micro and Nanotechnology LaboratoryBruce R Flachsbart - University of Illinois Urbana-ChampaignJohn C Selby - University of Illinois Urbana-ChampaignMark A Shannon - University of Illinois Urbana-Champaign
- Contributors
- M.S Shur (Editor)D Urban (Editor)P Wilson (Editor)
- Resource Type
- Journal article
- Publication Details
- MRS proceedings, Vol.736, pp.165-170
- DOI
- 10.1557/PROC-736-D4.5
- ISSN
- 0272-9172
- eISSN
- 1946-4274
- Publisher
- Cambridge University Press
- Number of pages
- 6
- Language
- English
- Date published
- 2002
- Academic Unit
- Roy J. Carver Department of Biomedical Engineering; Dermatology
- Record Identifier
- 9984296306202771
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