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Direct writing of sub-5 nm hafnium diboride metallic nanostructures
Journal article   Peer reviewed

Direct writing of sub-5 nm hafnium diboride metallic nanostructures

Wei Ye, Pamela A Peña Martin, Navneet Kumar, Scott R Daly, Angus A Rockett, John R Abelson, Gregory S Girolami and Joseph W Lyding
ACS nano, Vol.4(11), pp.6818-6824
2010
DOI: 10.1021/nn1018522
PMID: 20964393

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Abstract

Sub-5 nm metallic hafnium diboride (HfB(2)) nanostructures were directly written onto Si(100)-2 × 1:H surfaces using ultrahigh vacuum scanning tunneling microscope (UHV-STM) electron beam induced deposition (EBID) of a carbon-free precursor molecule, tetrakis(tetrahydroborato)hafnium, Hf(BH(4))(4). Scanning tunneling spectroscopy data confirm the metallic nature of the HfB(2) nanostructures, which have been written down to lateral dimensions of ∼2.5 nm. To our knowledge, this is the first demonstration of sub-5 nm metallic nanostructures in an STM-EBID experiment.

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