Journal article
Electrically detected magnetic resonance and near-zero field magnetoresistance in Si-28/(SiO2)-Si-28
Journal of applied physics, Vol.130(6), 065701
08/14/2021
DOI: 10.1063/5.0057871
Abstract
We report on electrically detected magnetic resonance (EDMR) and near-zero-field magnetoresistance (NZFMR) measurements observed through spin-dependent trap-assisted-tunneling on unpassivated Si/SiO2 metal-insulator-semiconductor capacitors comparing those containing silicon of natural isotopic abundance and silicon depleted of Si-29. Although our measurements involve monitoring the spin-dependence of the trap-assisted-tunneling current responsible for leakage across the oxide, the EDMR spectra resemble that of a combination of P-b0 and P-b1 silicon dangling bonds sites at the Si/SiO2 interface. Additionally, we observe a substantial narrowing of the NZFMR response with the removal of Si-29 nuclei. The breadth of the NZFMR response is strongly influenced by hyperfine interactions. Since superhyerfine interactions between Si-29 nuclei and silicon dangling bonds at the Si/SiO2 interface are a full order of magnitude stronger than such interactions involving silicon dangling bonds defects (E ' centers) within the oxide, the NZFMR results also strongly suggest a response dominated by Si/SiO2 interface trap defects. These results collectively suggest very strongly that the leakage currents that we observe involve tunneling from Si/SiO2 P-b dangling bonds to defects within the oxide. Our results thus offer fundamental insight into technologically important phenomena involving oxide leakage currents in metal-oxide-semiconductor devices such as stress induced leakage currents and time dependent dielectric breakdown.
Details
- Title: Subtitle
- Electrically detected magnetic resonance and near-zero field magnetoresistance in Si-28/(SiO2)-Si-28
- Creators
- Elias B. Frantz - IntelDavid J. Michalak - IntelNicholas J. Harmon - University of EvansvilleEric M. Henry - Intel Corp, Intel Components Res, Hillsboro, OR 97124 USAStephen J. Moxim - Pennsylvania State UniversityMichael E. Flatte - University of IowaSean W. King - IntelJames S. Clarke - IntelPatrick M. Lenahan - Pennsylvania State University
- Resource Type
- Journal article
- Publication Details
- Journal of applied physics, Vol.130(6), 065701
- Publisher
- Amer Inst Physics
- DOI
- 10.1063/5.0057871
- ISSN
- 0021-8979
- eISSN
- 1089-7550
- Number of pages
- 7
- Grant note
- HDTRA1-18-0012 / Defense Threat Reduction Agency (DTRA); United States Department of Defense; Defense Threat Reduction Agency Intel Global Supply Chain internship program
- Language
- English
- Date published
- 08/14/2021
- Academic Unit
- Physics and Astronomy; Electrical and Computer Engineering
- Record Identifier
- 9984428794102771
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