Journal article
Electron distribution functions in a sputtering magnetron discharge
Japanese journal of applied physics, Vol.34(9A), pp.4977-4982
1995
DOI: 10.1143/JJAP.34.4977
Abstract
The electron distribution function g(vz) in a cylindrically symmetric, planar, sputtering magnetron has been characterized using a one-sided, planar Langmuir probe. Measurements were made above the magnetic trap at six radial locations in the direction normal to the cathode. The distribution function is found to be non-Maxwellian, with a shape that depends sensitively on radial position. Near the symmetry axis, g(vz) is anisotropic and exhibits a strong electron drift from the cathode to the anode. Off axis, g(vz) is nearly symmetric and has two components: a dense, cold Maxwellian component, and a tenuous, energetic shell component. © 1995 The Japan Society of Applied Physics.
Details
- Title: Subtitle
- Electron distribution functions in a sputtering magnetron discharge
- Creators
- T. E Sheridan - West Virginia UniversityM. J Goeckner - West Virginia UniversityJ Goree - West Virginia University
- Resource Type
- Journal article
- Publication Details
- Japanese journal of applied physics, Vol.34(9A), pp.4977-4982
- Publisher
- Japanese journal of applied physics
- DOI
- 10.1143/JJAP.34.4977
- ISSN
- 0021-4922
- eISSN
- 1347-4065
- Language
- English
- Date published
- 1995
- Academic Unit
- Physics and Astronomy; Mechanical Engineering
- Record Identifier
- 9984200029002771
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