Journal article
Electron velocity distribution functions in a sputtering magnetron discharge for the E × B direction
Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.16(4), pp.2173-2176
07/1998
DOI: 10.1116/1.581325
Abstract
The electron velocity distribution function is measured for the
E
×
B
(azimuthal) direction in a cylindrically symmetric, planar, sputtering magnetron discharge as a function of height above the cathode. Near the cathode, the distribution function is approximately a warm Maxwellian
(T
e
≈2
eV
)
shifted in the
E
×
B
direction, indicating a strong azimuthal drift. Farther above the cathode, the distribution function is characterized by a cold
(T
e
≈0.5
eV
),
Maxwellian bulk with energetic, asymmetric tails.
Details
- Title: Subtitle
- Electron velocity distribution functions in a sputtering magnetron discharge for the E × B direction
- Creators
- T. E. Sheridan - University of IowaM. J. Goeckner - University of IowaJ. Goree - Department of Physics and Astronomy, The University of Iowa, Iowa City, Iowa 52242
- Resource Type
- Journal article
- Publication Details
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.16(4), pp.2173-2176
- DOI
- 10.1116/1.581325
- ISSN
- 0734-2101
- eISSN
- 1520-8559
- Number of pages
- 4
- Language
- English
- Date published
- 07/1998
- Academic Unit
- Physics and Astronomy; Mechanical Engineering
- Record Identifier
- 9984429034002771
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