Evolution of a particulate cloud in an RF plasma

Journal article

G Praburam and J Goree

IEEE transactions on plasma science, Vol.24(1), pp.97-98

02/1996

DOI: 10.1109/27.491710

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Video images of a cloud of carbon particulates grown in an RF sputtering plasma show a cyclic process of cloud growth, instability, and collapse.

Clouds

Dusty plasma

Electrodes

Light scattering

Particle scattering

Plasma accelerators

Plasma materials processing

Plasma sheaths

Plasma simulation

Radio frequency

Title: Subtitle: Evolution of a particulate cloud in an RF plasma
Creators: G Praburam - University of Iowa
J Goree - University of Iowa
Resource Type: Journal article
Publication Details: IEEE transactions on plasma science, Vol.24(1), pp.97-98
Publisher: IEEE
DOI: 10.1109/27.491710
ISSN: 0093-3813
eISSN: 1939-9375
Language: English
Date published: 02/1996
Academic Unit: Physics and Astronomy; Mechanical Engineering
Record Identifier: 9984199778202771

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