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High Throughput Laser Process of Transparent Conducting Surfaces for Terahertz Bandpass Ultrathin Metamaterials
Journal article   Open access   Peer reviewed

High Throughput Laser Process of Transparent Conducting Surfaces for Terahertz Bandpass Ultrathin Metamaterials

Qinghua Wang, Michaella Raglione, Baojia Li, Xin Jin, Fatima Toor, Mark Arnold and Hongtao Ding
Scientific reports, Vol.9(1), pp.3083-3083
02/28/2019
DOI: 10.1038/s41598-019-38949-1
PMCID: PMC6395646
PMID: 30816138
url
https://doi.org/10.1038/s41598-019-38949-1View
Published (Version of record) Open Access

Abstract

Terahertz (THz) imaging has attracted much attention within the past decade as an emerging nondestructive evaluation technique. In this paper, we present a novel Laser-based Metamaterial Fabrication (LMF) process for high-throughput fabrication of transparent conducting surfaces on dielectric substrates such as glass, quartz and polymers to achieve tunable THz bandpass characteristics. The LMF process comprises two steps: (1) applying ultrathin-film metal deposition, with a typical thickness of 10 nm, on the dielectric substrate; (2) creating a ~100-micron feature pattern on the metal film using nanosecond pulsed laser ablation. Our results demonstrate the use of laser-textured ultra-thin film with newly integrated functional capabilities: (a) highly conductive with ~20 Ω/sq sheet resistance, (b) optically transparent with ~70% transmittance within visible spectrum, and (c) tunable bandpass filtering effect in the THz frequency range. A numerical analysis is performed to help determine the fundamental mechanism of THz bandpass filtering for the LMF-built samples. The scientific findings from this work render an economical and scalable manufacturing technique capable of treating large surface area for multi-functional metamaterials.

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