Journal article
Laser‐induced fluorescence characterization of ions in a magnetron plasma
Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.8(6), pp.3920-3924
11/01/1990
DOI: 10.1116/1.576421
Abstract
We report for the first time laser‐induced fluorescence measurements of a sputtering magnetron plasma. From these measurements we determined the density, average velocity, and temperature of the ions. The ion density profile is peaked at the same location as the electron density profile, which was measured with a Langmuir probe. The average ion velocity parallel to the cathode surface is less than our detection limit of 93 m/s. The ions at the edge of the discharge are room temperature, while in the center of the discharge they reach a temperature of 0.64 eV. These temperatures are attributed to acceleration of the ions by the electric field in the plasma, together with collisional scattering.
Details
- Title: Subtitle
- Laser‐induced fluorescence characterization of ions in a magnetron plasma
- Creators
- M. J. Goeckner - University of IowaJ. Goree - Department of Physics and Astronomy, The University of Iowa, Iowa City, Iowa 52242T. E. Sheridan - University of Iowa
- Resource Type
- Journal article
- Publication Details
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.8(6), pp.3920-3924
- DOI
- 10.1116/1.576421
- ISSN
- 0734-2101
- eISSN
- 1520-8559
- Number of pages
- 5
- Language
- English
- Date published
- 11/01/1990
- Academic Unit
- Physics and Astronomy; Mechanical Engineering
- Record Identifier
- 9984428840502771
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