Journal article
Low‐frequency turbulent transport in magnetron plasmas
Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.7(3), pp.1014-1018
05/01/1989
DOI: 10.1116/1.576221
Abstract
We report the results of an experiment to determine if low‐frequency turbulence (frequencies less than the ion plasma frequency) seen in magnetron plasmas is responsible for the transport of electrons across magnetic field lines. This is done by finding the scaling of the electron confinement time τ on the mean‐square electric field fluctuation 〈‖δE‖2〉. Turbulent transport models predict the scaling should be τ∝〈‖δE‖2〉−
1. Data were taken at a constant pressure of 1.1 Pa of argon and for discharge current densities from 25 to 150 A/m2. Density fluctuations were recorded, and the maximum rms level was <5.2%. Measured values of τ ranged from 0.65 to 0.85 μs as the discharge current density was varied over its full range. Assuming the observed turbulent spectrum is composed of ion acoustic waves, we find that τ∝〈‖δE‖2〉−0.15, quite different from the prediction. We conclude low‐frequency turbulence is not responsible for cross‐field electron transport.
Details
- Title: Subtitle
- Low‐frequency turbulent transport in magnetron plasmas
- Creators
- T. E. Sheridan - University of IowaJ. Goree - Department of Physics and Astronomy, The University of Iowa, Iowa City, Iowa 52242‐1410
- Resource Type
- Journal article
- Publication Details
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.7(3), pp.1014-1018
- DOI
- 10.1116/1.576221
- ISSN
- 0734-2101
- eISSN
- 1520-8559
- Number of pages
- 5
- Language
- English
- Date published
- 05/01/1989
- Academic Unit
- Physics and Astronomy; Mechanical Engineering
- Record Identifier
- 9984428813202771
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