Journal article
Metrology for Measuring Custom Periodicities on Diffraction Gratings
Journal of Astronomical Instrumentation, Vol.10(2), 2150005
06/2021
DOI: 10.1142/S2251171721500057
Abstract
We present a new, inexpensive, bench-top method for measuring groove period over large areas with high mapping resolution and high measurement accuracy, dubbed the grating mapper for accurate period (GMAP). The GMAP has the ability to measure large groove period changes and nonparallel grooves, both of which cannot be measured via optical interferometry. In this paper, we detail the calibration and setup of the GMAP, and employ the instrument to measure three distinct gratings. Two of these measured gratings have customized groove patterns that prevent them from being measured via other traditional methods, such as optical interferometry. Our implementation of this tool achieves a spatial resolution of 0.1 mm x 0.1 mm and a period error of 1.7 nm for a 3 mu m size groove period.
Details
- Title: Subtitle
- Metrology for Measuring Custom Periodicities on Diffraction Gratings
- Creators
- Ningxiao Zhang - Pennsylvania State UniversityRandall McEntaffer - Pennsylvania State UniversityRoss McCurdy - Pennsylvania State UniversityCasey DeRoo - University of Iowa
- Resource Type
- Journal article
- Publication Details
- Journal of Astronomical Instrumentation, Vol.10(2), 2150005
- Publisher
- World Scientific
- DOI
- 10.1142/S2251171721500057
- ISSN
- 2251-1717
- eISSN
- 2251-1725
- Number of pages
- 12
- Grant note
- Pennsylvania State University 80NSSC19K0661 / NASA; National Aeronautics & Space Administration (NASA)
- Language
- English
- Date published
- 06/2021
- Academic Unit
- Physics and Astronomy; University College Courses
- Record Identifier
- 9984428823002771
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