Journal article
Model of energetic electron transport in magnetron discharges
Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.8(1), pp.30-37
01/1990
DOI: 10.1116/1.577093
Abstract
A particle model of energetic electron transport in sputtering magnetron discharges is presented. The model assumes time‐independent magnetic and electric fields and supposes that scattering by neutral atoms is the dominant transport mechanism. Without scattering, we find that some orbits are confined indefinitely. Using the differential cross sections for elastic, excitation, and ionization collisions in argon, we perform a Monte Carlo simulation of the electrons emitted by ion bombardment of a planar magnetron cathode to predict the spatial distribution of ionization. We find good agreement with experimental measurements of the radial profile of ion flux to the cathode and of the axial profile of optical emission.
Details
- Title: Subtitle
- Model of energetic electron transport in magnetron discharges
- Creators
- T. E. Sheridan - University of IowaM. J. Goeckner - University of IowaJ. Goree - Department of Physics and Astronomy, The University of Iowa, Iowa City, Iowa 52242‐1410
- Resource Type
- Journal article
- Publication Details
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.8(1), pp.30-37
- DOI
- 10.1116/1.577093
- ISSN
- 0734-2101
- eISSN
- 1520-8559
- Number of pages
- 8
- Language
- English
- Date published
- 01/1990
- Academic Unit
- Physics and Astronomy; Mechanical Engineering
- Record Identifier
- 9984428807002771
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