Journal article
Monte Carlo simulation of ionization in a magnetron plasma
Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.8(3), pp.1627-1631
05/01/1990
DOI: 10.1116/1.576777
Abstract
A Monte Carlo simulation of electrons emitted from the cathode of a planar magnetron is tested against experiments that were reported by Wendt, Lieberman, and Meuth [J. Vac. Sci. Technol. A 6, 1827 (1988)] and by Gu and Lieberman [J. Vac. Sci. Technol. A 6, 2960 (1988)]. Comparing their measurements of the radial profile of current and the axial profile of optical emission to the ionization profiles predicted by the model, we find good agreement for a typical magnetic field strength of 456 G. We also find that at 456 G the product of the average number of ionizations 〈N
i
〉 and the secondary electron emission coefficient γ is ∼1. This indicates that secondary emission contributes significantly to the ionization that sustains the discharge. At 171 G, however, 〈N
i
〉γ≪1, revealing that cathode emission is inadequate to sustain a discharge at a low magnetic field.
Details
- Title: Subtitle
- Monte Carlo simulation of ionization in a magnetron plasma
- Creators
- J. E. Miranda - University of IowaM. J. Goeckner - University of IowaJ. Goree - University of IowaT. E. Sheridan - University of Iowa
- Resource Type
- Journal article
- Publication Details
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.8(3), pp.1627-1631
- DOI
- 10.1116/1.576777
- ISSN
- 0734-2101
- eISSN
- 1520-8559
- Number of pages
- 5
- Language
- English
- Date published
- 05/01/1990
- Academic Unit
- Physics and Astronomy; Mechanical Engineering
- Record Identifier
- 9984428806902771
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