Journal article
Observation of two‐temperature electrons in a sputtering magnetron plasma
Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.9(3), pp.688-690
05/1991
DOI: 10.1116/1.577344
Abstract
We experimentally find that there are hot and cold electron components present in a sputtering magnetron plasma. The density of the hot component is greatest in the magnetic trap and decreases with the distance from the cathode. The cold electron density is negligible inside the trap and is approximately constant outside. The largest cold electron density is nearly as great as the hot electron density inside the magnetic trap.
Details
- Title: Subtitle
- Observation of two‐temperature electrons in a sputtering magnetron plasma
- Creators
- T. E. Sheridan - University of IowaM. J. Goeckner - University of IowaJ. Goree - University of Iowa
- Resource Type
- Journal article
- Publication Details
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.9(3), pp.688-690
- DOI
- 10.1116/1.577344
- ISSN
- 0734-2101
- eISSN
- 1520-8559
- Number of pages
- 3
- Language
- English
- Date published
- 05/1991
- Academic Unit
- Physics and Astronomy; Mechanical Engineering
- Record Identifier
- 9984429060102771
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