Journal article
Patterning by Etching at the Nanoscale (PENs) on Si(111) through the Controlled Etching of PDMS
Chemistry of materials, Vol.19(11), pp.2903-2909
05/29/2007
DOI: 10.1021/cm062988n
Abstract
Patterned polymer brushes were grown from organic monolayers on Si(111) using ring-opening metathesis polymerization catalyzed by the Grubbs' first generation catalyst. The Grubbs' catalyst reacted through cross metathesis with an olefin-terminated monolayer on Si(111) such that it was attached to the monolayer. Next, a polydimethylsiloxane slab patterned in bas-relief was placed on this surface to form microchannels. Undecenoic acid was added to the microchannels to react with and remove the Grubbs' catalyst from the surface exposed in the microchannels. Next, the microchannels were etched by tens of nanometers to several micrometers with F-. This etching exposed fresh monolayers on the silicon terminated with the Grubbs' catalyst. A solution of bicyclo[2.2.1]hept-5-ene-2-carboxylic acid was added to the microchannels and polymer brushes grew by ring-opening metathesis polymerization only on the newly exposed surface. A range of polymer brushes with widths from 70 nm to several micrometers was fabricated. This method is exciting because an entire surface can be patterned simultaneously and it is not limited by the wavelength of light. Rather, the width of the polymer brushes is determined by the amount of polydimethylsiloxane that is etched from the microchannels. In addition, this method can be used to pattern surfaces inside of existing microchannels. These polymer brushes were characterized by a combination of methods including X-ray photoelectron spectroscopy, scanning Auger spectroscopy, scanning electron microscopy, and optical microscopy.
Details
- Title: Subtitle
- Patterning by Etching at the Nanoscale (PENs) on Si(111) through the Controlled Etching of PDMS
- Creators
- Mathew Perring - Department of Chemistry, University of Iowa, 423K Chemistry Building, Iowa City, Iowa 52242, andDepartment of Chemical & Biomolecular Engineering, University of Illinois at Urbana−Champaign, 600South Mathews Avenue, Urbana, Illinois 61801Michael Mitchell - Department of Chemistry, University of Iowa, 423K Chemistry Building, Iowa City, Iowa 52242, andDepartment of Chemical & Biomolecular Engineering, University of Illinois at Urbana−Champaign, 600South Mathews Avenue, Urbana, Illinois 61801Paul J. A Kenis - Department of Chemistry, University of Iowa, 423K Chemistry Building, Iowa City, Iowa 52242, andDepartment of Chemical & Biomolecular Engineering, University of Illinois at Urbana−Champaign, 600South Mathews Avenue, Urbana, Illinois 61801Ned B Bowden - Department of Chemistry, University of Iowa, 423K Chemistry Building, Iowa City, Iowa 52242, andDepartment of Chemical & Biomolecular Engineering, University of Illinois at Urbana−Champaign, 600South Mathews Avenue, Urbana, Illinois 61801
- Resource Type
- Journal article
- Publication Details
- Chemistry of materials, Vol.19(11), pp.2903-2909
- Publisher
- American Chemical Society
- DOI
- 10.1021/cm062988n
- ISSN
- 0897-4756
- eISSN
- 1520-5002
- Language
- English
- Date published
- 05/29/2007
- Academic Unit
- Chemistry
- Record Identifier
- 9984216596302771
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