Journal article
Pressure dependence of ionization efficiency in sputtering magnetrons
Applied physics letters, Vol.57(20), pp.2080-2082
1990
DOI: 10.1063/1.103947
Abstract
Using a Monte Carlo simulation, we show how electron confinement allows sputtering magnetrons to operate at lower neutral pressures than similar unmagnetized devices. We find that at both high and low pressures, the ionization efficiency in a magnetron is constant, and it varies by only 40% between the two regimes. In contrast, the efficiency of an unmagnetized discharge varies linearly with pressure, becoming very small at low pressures.
Details
- Title: Subtitle
- Pressure dependence of ionization efficiency in sputtering magnetrons
- Creators
- T. E Sheridan - University of IowaM. J Goeckner - University of IowaJ Goree - University of Iowa
- Resource Type
- Journal article
- Publication Details
- Applied physics letters, Vol.57(20), pp.2080-2082
- Publisher
- American Institute of Physics
- DOI
- 10.1063/1.103947
- ISSN
- 0003-6951
- eISSN
- 1077-3118
- Language
- English
- Date published
- 1990
- Academic Unit
- Physics and Astronomy; Mechanical Engineering
- Record Identifier
- 9984199787302771
Metrics
4 Record Views