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Rapid and Minimally Invasive Quantum Cascade Wafer Testing
Journal article

Rapid and Minimally Invasive Quantum Cascade Wafer Testing

E.N Bentil, F Toor, A.J Hoffman, M.D Escarra and C.F Gmachl
IEEE photonics technology letters, Vol.21(8), pp.531-533
04/15/2009
DOI: 10.1109/LPT.2009.2014392

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Abstract

Current measurement Density measurement Etching Intersubband Metallization midinfrared Minimally invasive surgery Optical design Optical materials quantum cascade (QC) laser Quantum cascade lasers Testing wafer quality Wavelength measurement

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