Journal article
Spectroscopic characterization of acid generation and concentration and free volume evolution in chemically amplified resists
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol.20(1), pp.219-225
01/2002
DOI: 10.1116/1.1432969
Abstract
We report on the measurement of proton concentration and local viscosity in a polymeric chemically amplified photoresist material. We interrogate these properties using crystal violet, a cationic triphenylmethane dye molecule. To determine the quantity of acid generated by the chemically amplified photoresist material on exposure to UV light, we characterize the pH-dependent linear optical response of crystal violet. To establish a frame of reference for these data, we determine the acid dissociation constants of crystal violet in aqueous solution. The viscosity of the resist material is related to the transient optical response of crystal violet. The data on the photoresist material demonstrate a rapid and persistent
p
H
change in the polymer matrix upon UV irradiation, with the viscosity of the matrix changing by a relatively small amount, going from ∼150 cP prior to processing to ∼190 cP after UV exposure and heating.
Details
- Title: Subtitle
- Spectroscopic characterization of acid generation and concentration and free volume evolution in chemically amplified resists
- Creators
- J. L. P Jessop - Department of Chemical and Biochemical Engineering, University of Iowa, Iowa City, Iowa 52242-1219S. N Goldie - Department of Chemistry, Michigan State University, East Lansing, Michigan 48824-1322A. B Scranton - Department of Chemical and Biochemical Engineering, University of Iowa, Iowa City, Iowa 52242-1219G. J Blanchard - Department of Chemistry, Michigan State University, East Lansing, Michigan 48824-1322
- Resource Type
- Journal article
- Publication Details
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol.20(1), pp.219-225
- DOI
- 10.1116/1.1432969
- ISSN
- 0734-211X
- eISSN
- 1520-8567
- Number of pages
- 7
- Language
- English
- Date published
- 01/2002
- Academic Unit
- Chemical and Biochemical Engineering
- Record Identifier
- 9984003955302771
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