Journal article
Stress-balancing in piezoelectric adjustable x-ray optics
Journal of astronomical telescopes, instruments, and systems, Vol.8(2), pp.029004-029004
04/01/2022
DOI: 10.1117/1.JATIS.8.2.029004
Abstract
Next-generation x-ray observatories require lightweight, high throughput optics that maintain a <0.5 arcsec resolution to probe the physics of black holes and gain understanding of the early universe. One potential type of x-ray mirror consists of a 400-μm thick curved Corning EAGLE XG® glass substrate with a Cr/Ir x-ray mirror coating deposited on the front (concave) side and an array of radio frequency sputtered Pb0.995 ( Zr0.52Ti0.48)0.99Nb0.01O3 piezoelectric thin film actuators on the back (convex) side to enable correction of figure errors. A stress-balancing process was developed to correct the figure distortion arising from thin film stresses in the actuator layers. Compressively stressed SiO2 films were deposited on the convex side of the mirror to balance the tensile integrated stress of the actuator array while also matching the film thickness distribution. Finite-element methods were used to assess the impact of film thickness distributions on the convex and concave substrate surfaces. The resulting models show peak-to-valley figure errors of 105 nm, well within the 1-μm peak-to-valley dynamic range of the piezoelectric adjusters. In contrast, when stress compensation was done with an iridium mirror film deposited on the front side, the mismatched thickness distribution results in peak-to-valley figure errors over 3 μm.
Details
- Title: Subtitle
- Stress-balancing in piezoelectric adjustable x-ray optics
- Creators
- Nathan L. Bishop - Pennsylvania State UniversityVladimir Kradinov - Center for Astrophysics Harvard & SmithsonianPaul B. Reid - Center for Astrophysics Harvard & SmithsonianThomas N. Jackson - Pennsylvania State UniversityCasey T DeRoo - University of Iowa, Department of Physics and Astronomy, Iowa City, Iowa, United StatesSusan Trolier-McKinstry - Pennsylvania State University
- Resource Type
- Journal article
- Publication Details
- Journal of astronomical telescopes, instruments, and systems, Vol.8(2), pp.029004-029004
- Publisher
- Society of Photo-Optical Instrumentation Engineers
- DOI
- 10.1117/1.JATIS.8.2.029004
- ISSN
- 2329-4124
- eISSN
- 2329-4221
- Grant note
- NNX16AG29G; NNX17AF66G / National Aeronautics and Space Administration (https://doi.org/10.13039/100000104)
- Language
- English
- Date published
- 04/01/2022
- Academic Unit
- Physics and Astronomy; University College Courses
- Record Identifier
- 9984428685902771
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