Journal article
Toward superfast three-dimensional optical metrology with digital micromirror device platforms
Optical engineering, Vol.53(11), pp.112206-112206
11/01/2014
DOI: 10.1117/1.OE.53.11.112206
Abstract
Decade-long research efforts toward superfast three-dimensional (3-D) shape measurement leveraging the digital micromirror device (DMD) platforms are summarized. Specifically, we will present the following technologies: (1) high-resolution real-time 3-D shape measurement technology that achieves 30 Hz simultaneous 3-D shape acquisition, reconstruction, and display with more than 300,000 points per frame; (2) superfast 3-D optical metrology technology that achieves 3-D measurement at a rate of tens of kilohertz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and high-accuracy 3-D optical metrology using the DMD platforms. Both principles and experimental results are presented.
Details
- Title: Subtitle
- Toward superfast three-dimensional optical metrology with digital micromirror device platforms
- Creators
- Tyler Bell - Iowa State University, Department of Mechanical Engineering, Ames, Iowa 50011Song Zhang - Iowa State University, Department of Mechanical Engineering, Ames, Iowa 50011
- Resource Type
- Journal article
- Publication Details
- Optical engineering, Vol.53(11), pp.112206-112206
- DOI
- 10.1117/1.OE.53.11.112206
- ISSN
- 0091-3286
- eISSN
- 1560-2303
- Publisher
- Society of Photo-Optical Instrumentation Engineers
- Grant note
- CMMI-1150711; CMMI-1300376 / National Science Foundation (NSF)
- Language
- English
- Date published
- 11/01/2014
- Academic Unit
- Electrical and Computer Engineering
- Record Identifier
- 9984083804002771
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