Journal article
Ultrasonic-vibration-assisted laser annealing of fluorine-doped tin oxide thin films for improving optical and electrical properties: Overlapping rate optimization
Ceramics international, Vol.44(18), pp.22225-22234
12/15/2018
DOI: 10.1016/j.ceramint.2018.08.342
Abstract
An ultrasonic-vibration-assisted laser annealing method was developed to enhance the performance of fluorine-doped tin oxide (FTO) thin films. The influences of ultrasonic vibration, laser scan line overlapping rate (LOR) and laser spot overlapping rate (SOR) on surface morphology, FTO layer thickness, RMS roughness, crystal structure and photoelectric properties of the FTO films were investigated. The results indicated that the presence of ultrasonic vibration during laser annealing could significantly enhance the film compactness, and using moderate LOR and SOR values resulted in significantly decreased FTO layer thicknesses and RMS roughnesses as well as slightly increased crystallite sizes, thus yielding significantly improved optical transmittance values and slightly enhanced electrical conductivity values. It was found that the optimal LOR and SOR values for ultrasonic-vibration-assisted laser annealing of the FTO films were 80% and 90%, respectively. The as-obtained film possessed the best overall photoelectric property with an average transmittance (400–800 nm) of 85.9%, a sheet resistance of 8.7 Ω/sq and a figure of merit of 2.51 × 10–2 Ω–1. This work may be of great significance in terms of performance optimization of transparent conducting oxide (TCO) thin films.
Details
- Title: Subtitle
- Ultrasonic-vibration-assisted laser annealing of fluorine-doped tin oxide thin films for improving optical and electrical properties: Overlapping rate optimization
- Creators
- Bao-Jia Li - Jiangsu UniversityYong-Ying Wang - Jiangsu UniversityLi-Jing Huang - Jiangsu UniversityHai-Di Cao - Jiangsu UniversityQinghua Wang - University of IowaNai-Fei Ren - Jiangsu UniversityHongtao Ding - University of Iowa
- Resource Type
- Journal article
- Publication Details
- Ceramics international, Vol.44(18), pp.22225-22234
- DOI
- 10.1016/j.ceramint.2018.08.342
- ISSN
- 0272-8842
- eISSN
- 1873-3956
- Publisher
- Elsevier Ltd
- Grant note
- DOI: 10.13039/501100001809, name: National Natural Science Foundation of China, award: 51805220, 61405078; name: Science and Technology Planned Project of Jiangsu Province of China, award: BE2015037; name: Natural Science Foundation of Jiangsu Province of China, award: BK20140567; name: Jiangsu Government Scholarship for Overseas Studies, award: JS-2016-095
- Language
- English
- Date published
- 12/15/2018
- Academic Unit
- Mechanical Engineering
- Record Identifier
- 9984196529602771
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