Journal article
Use of artificial neural networks on optical track width measurements
Applied optics (2004), Vol.46(22), pp.4857-4866
08/01/2007
DOI: 10.1364/AO.46.004857
PMID: 17676087
Abstract
We have demonstrated recently that, by using an ultrastable optical interferometer together with artificial neural networks (ANNs), track widths down to 60 nm can be measured with a 0.3 NA objective lens. We investigate the effective conditions for training ANNs. Experimental results will be used to show the characteristics of the training samples and the data format of the ANN inputs required to produce suitably trained ANNs. Results obtained with networks measuring double tracks, and classifying different structures, will be presented to illustrate the capability of the technique. We include a discussion on expansion of the application areas of the system, allowing it to be used as a general purpose instrument.
Details
- Title: Subtitle
- Use of artificial neural networks on optical track width measurements
- Creators
- Richard J Smith - School of Electrical and Electronic Engineering, University of Nottingham, University Park, Nottingham, NG7 2RD,United Kingdom. eexrjs@nottingham.ac.ukChung W SeeMike G SomekhAndrew Yacoot
- Resource Type
- Journal article
- Publication Details
- Applied optics (2004), Vol.46(22), pp.4857-4866
- DOI
- 10.1364/AO.46.004857
- PMID
- 17676087
- NLM abbreviation
- Appl Opt
- ISSN
- 1559-128X
- eISSN
- 2155-3165
- Publisher
- United States
- Language
- English
- Date published
- 08/01/2007
- Academic Unit
- Roy J. Carver Department of Biomedical Engineering; Molecular Physiology and Biophysics; Anatomy and Cell Biology; Stead Family Department of Pediatrics; Iowa Neuroscience Institute; Otolaryngology; Internal Medicine
- Record Identifier
- 9984006434802771
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