FLUENCE DEPENDENCE OF EXCIMER-LASER ABLATION OF AIN

Conference proceeding

J K LUMPP, C N CORETSOPOULOS and S D ALLEN

ELECTRONIC PACKAGING MATERIALS SCIENCE VII, Vol.323, pp.213-218

1994

View Online

Title: Subtitle: FLUENCE DEPENDENCE OF EXCIMER-LASER ABLATION OF AIN
Creators: J K LUMPP
C N CORETSOPOULOS
S D ALLEN
Contributors: R A Pollak (Editor)
Resource Type: Conference proceeding
Publication Details: ELECTRONIC PACKAGING MATERIALS SCIENCE VII, Vol.323, pp.213-218
Language: English
Date published: 1994
Academic Unit: Chemical and Biochemical Engineering
Record Identifier: 9984231945302771

8 Record Views