Electrode array having a thin, flexible substrate

An electrode array includes a flexible substrate, and a plurality of electrodes disposed on the flexible substrate. The flexible substrate is preferably formed of polyimide. The contacts preferably have a diameter in the range of approximately 10 μm to 1 mm. The an electrode array is manufactured by forming a plurality of electrodes on a flexible substrate by forming a metal line on the flexible substrate for each of the plurality of electrodes by depositing one or more metals using electron beam evaporation and then patterning the one or more metals and forming a contact on the flexible substrate for each of the plurality of electrodes using one of electroplating and embossing, and then forming an insulating film on the flexible substrate except over the contacts and areas of the electrodes utilized for connections to an electrical device. Electroplating is utilized to form contacts less than approximately 100 μm in diameter, and embossing is utilized to form contacts greater than approximately 100 μm in diameter.